Metal Ring Seals in Vacuum Semidonductor
Introduction
In the semiconductor sector, metal ring seals are routinely used to avoid contamination and preserve equipment vacuum.
These seals are designed to fit over a variety of components, including flanges, tubes, and ports, and are built from a flexible metal substance.
Advantages of Metal Ring Seals
• High resistance to chemical and temperature changes
Metal ring seals are made of materials that can withstand harsh chemical environments and extreme temperatures, making them ideal for use in semiconductor equipment.
• Low outgassing
Metal ring seals have low outgassing rates, which means that they release fewer gases into the surrounding environment. This is important in the semiconductor industry, where even small amounts of contamination can affect the performance of equipment.
• High sealing performance
Metal ring seals are designed to provide a reliable and tight seal, preventing contaminants from entering the equipment and maintaining vacuum conditions.
Metal Ring Seal Applications in Semiconductor Equipment
• Vacuum processing
Metal ring seals are used to maintain vacuum conditions in equipment used for processes such as deposition, etching, and implantation.
• Wafer handling
Metal ring seals are used to prevent contamination in equipment used for handling and processing wafers, such as wafer carriers and cassettes.
• Gas delivery
Metal ring seals are used to seal gas delivery systems, including gas lines, valves, and ports, in semiconductor equipment.
Conclusion
Metal ring seals are an essential component in the semiconductor industry, as they provide consistent sealing performance and contamination protection.
Due to their resistance to hostile chemical conditions and high temperatures, they are suited for use in a variety of semiconductor equipment.
